This Draft Standard addresses the cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom, and surfaces of materials in a cleanroom. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.

The efficacy of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644-9:2012 and ISO 14644-10:2013.