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BS 11/30248115 DC

BS EN ISO 14644-8. Cleanrooms and associated controlled environments. Part 8. Classification of air cleanliness by chemical concentration

standard by BSI Group , 09/29/2011

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Cross References:
ISO 14644-6
ISO 14644-4:2001
ISO 14644-5:2004
ISO 14644-7:2004
ISO 14698
SEMI F21-1102
IEST-G-CC035.1
ASTM D5127:1999
JACA No.34:2000
JACA No.35A:2003
JACA No.43:2006
SEMI E108-0307
IEST-RP-CC031.2
IDEMA Standard M11-99
JIS B9917-8:2010
SEMI E45-1101


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Published:
09/29/2011
Number of Pages:
35
 

Document History

  1. BS EN ISO 14644-8:2022


    Cleanrooms and associated controlled environments-Assessment of air cleanliness by chemical concentration (ACC)

    • Most Recent

  2. BS EN ISO 14644-8:2013


    Cleanrooms and associated controlled environments-Classification of air cleanliness by chemical concentration (ACC)

    • Historical Version

  3. BS 11/30248115 DC

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    BS EN ISO 14644-8. Cleanrooms and associated controlled environments. Part 8. Classification of air cleanliness by chemical concentration

    • Historical Version

  4. BS EN ISO 14644-8:2006


    Cleanrooms and associated controlled environments-Classification of airborne molecular contamination

    • Historical Version