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About This Item


Full Description

Cross References:
ISO 14644-6
ISO 14644-4:2001
ISO 14644-5:2004
ISO 14644-7:2004
ISO 14698
SEMI F21-1102
ASTM D5127-99
JACA No. 34-:2000
JACA No. 35A-2003
JACA No. 43-2006
SEMI E108-0307
IDEMA Standard M11-99
JIS B9917-8:2010
SEMI E45-1101
SEMI E460307

All current amendments available at time of purchase are included with the purchase of this document.

Document History

  1. BS EN ISO 14644-8:2013


    Cleanrooms and associated controlled environments

    • Most Recent
  2. BS 11/30248115 DC

    BS EN ISO 14644-8. Cleanrooms and associated controlled environments. Part 8. Classification of air cleanliness by chemical concentration

    • Historical Version
  3. BS EN ISO 14644-8:2006

    Cleanrooms and associated controlled environments

    • Historical Version