The design of a particular clean room, as of any building type or application, needs to be configured to the specific requirements of the project. There are certain principles, however, that are crucial for the success of every clean room design. The purpose of this paper is to discuss the underlying parameters and fundamental design concepts that will influence the selection, configuration, and interrelation of mechanical system components required for any particular application. Emphasis is placed on temperature, humidity, pressurization, and cleanliness requirements and their interrelationships with one another. Control concepts critical to these requirements will be presented, and the most significant energy conservation opportunities will be stressed. Finally, vibration/acoustic requirements for HVAC clean room design will be identified.

Units: Dual