This part of ISO 14644 covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less - "nanoscale" - are considered.

The monitoring given in this document is for use mainly in "operational" states.

Note 1 to entry For the purposes of this document, reference will be made to "nanoscale particles", which here signify all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.

Note 2 to entry It should be noted that the actual behaviour of particles in the cleanroom depends on their sources and physical behaviour.

Note 3 to entry Health and safety considerations are excluded from this document.