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ISO 16700:2016

Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification

standard by International Organization for Standardization , 08/01/2016

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Full Description

ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.

 

Product Details

Published:
08/01/2016
Number of Pages:
26
File Size:
1 file , 1 MB
Same As:
BS ISO 16700:2016
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This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 16700:2016

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    Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification

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  2. ISO 16700:2004


    Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification

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