IEST RP-CC024.1
Measuring & Reporting Vibration in Microelectronic Facilities
Recommended Practice by Institute of Environmental Sciences and Technology, 12/01/2002
Most Recent
Language:
-
- Available Formats
- Options
- Availability
- Priced From ( in USD )
-
-
Secure PDF
Secure PDF Files
Secure PDF files include digital rights management (DRM) software. DRM is included at the request of the publisher, as it helps them protect their copyright by restricting file sharing. In order to read a Secure PDF, you will need to install the FileOpen Plug-In on your computer. The FileOpen Plug-In works with Adobe Reader and other viewers. Visit FileOpen to see the full list.
-
What you can do with a Secure PDF:
- Print
- Search
- Highlight
- Bookmark
- Immediate download
- $245.00
- Add to Cart
-
Secure PDF
-
- Printed Edition
- Ships in 1-2 business days
- $245.00
- Add to Cart
-
- Printed Edition + PDF
- Immediate download
- $343.00
- Add to Cart
Customers Who Bought This Also Bought
-
IEST RP-CC020.2
Priced From $245.00 -
IEST G-CC1003
Priced From $165.00 -
IEST RP-CC004.3
Priced From $230.00 -
IEST RP-CC007.3
Priced From $485.00
About This Item
Full Description
Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels. This RP is intended to provide guidance in the microelectronics industry. It may also be applicable in pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important.
