IEST RP-CC024.1
Measuring & Reporting Vibration in Microelectronic Facilities
Recommended Practice by Institute of Environmental Sciences and Technology, 12/01/2002
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Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels. This RP is intended to provide guidance in the microelectronics industry. It may also be applicable in pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important.
