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BS ISO 23131:2021

Ellipsometry. Principles

standard by British Standard / International Organization for Standardization , 04/27/2021

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About This Item

 

Full Description

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.

It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

All current amendments available at time of purchase are included with the purchase of this document.
 

Product Details

Published:
04/27/2021
ISBN(s):
9780539058703
Number of Pages:
24
File Size:
1 file , 1.7 MB
Product Code(s):
30400314, 30400314, 30400314
Note:
This product is unavailable in Russia, Ukraine, Belarus