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About This Item

 

Full Description

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.

This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 µm and 500 µm.
 

Document History

  1. BS EN ISO 14644-9:2022

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    Cleanrooms and associated controlled environments-Assessment of surface cleanliness for particle concentration

    • Most Recent
  2. BS EN ISO 14644-9:2012


    Cleanrooms and associated controlled environments-Classification of surface cleanliness by particle concentration

    • Historical Version
  3. BS 08/30190157 DC


    BS EN ISO 14644-9. Cleanrooms and associated controlled environments. Part 9. Classification of surface particle cleanliness

    • Historical Version