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BS EN ISO 14644-14:2016

ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms-Assessment of suitability for use of equipment by airborne particle concentration

standard by British Standard / European Standard / International Organization for Standardization , 10/31/2016

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Full Description

BS EN ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).

NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.

The following items are not covered by this part of ISO 14644:
  • assessment of suitability with respect to biocontamination;
  • testing for suitability of decontamination agents and techniques;
  • cleanability of equipment and materials;
  • requirements on design of equipment and selection of materials;
  • physical properties of materials (e.g. electrostatic, thermal properties);
  • optimizing performance of equipment for specific process applications;
  • selection and use of statistical methods for testing;
  • protocols and requirements for local safety regulations.

Cross References:
ISO 14644-1:2015
ISO 8573-8:2004
ISO 14644-3
ISO 14644-7:2004
ISO 14644-9
AIR 1167
IEST-RP-CC002.3
IEST-RP-CC013.3
IEST RP-CC026.2
IEST-RP-CC028.1
JIS B 9926
SEMI E49-1104
SEMI E137-0705
SEMI F28-1103
SEMI F70-0611
SEMI G67-0996
VDI 2083-9.1


All current amendments available at time of purchase are included with the purchase of this document.
 

Product Details

Published:
10/31/2016
ISBN(s):
9780580824937
Number of Pages:
32
File Size:
1 file , 2.1 MB
Same As:
ISO 14644-14:2016
Product Code(s):
30280737, 30280737, 30280737
Note:
This product is unavailable in Ukraine, Russia, Belarus