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About This Item

 

Full Description

1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

Section
Ion Sputtering6
Angle Lapping and Cross-Sectioning7
Mechanical Cratering8
Nondestructive Depth Profiling9

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

 

Document History

  1. ASTM E1127-08(2015)


    Standard Guide for Depth Profiling in Auger Electron Spectroscopy

    • Most Recent
  2. ASTM E1127-08


    Standard Guide for Depth Profiling in Auger Electron Spectroscopy

    • Historical Version
  3. ASTM E1127-03

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    Standard Guide for Depth Profiling in Auger Electron Spectroscopy

    • Historical Version
  4. ASTM E1127-91(1997)


    Standard Guide for Depth Profiling in Auger Electron Spectroscopy

    • Historical Version