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AS ISO 14237-2006 [ Withdrawn ]

Surface chemical analysis - Secondary-ion mass spectrometry - Determination of boron atomic concentration in silicon using uniformly doped materials

standard by Standards Australia , 10/20/2006

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Full Description

Adopts ISO 14237:2000 to specify a secondary-ion mass spectrometric method for the determination of boron atomic concentration in single-crystalline silicon, using uniformly doped materials calibrated by a certified reference material implanted with boron.
 

Product Details

Edition:
1st
Published:
10/20/2006
ISBN(s):
0733777929
Number of Pages:
22
File Size:
1 file , 690 KB
Product Code(s):
10103377, 10103364, 10103400
Note:
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