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Cross References:
ISO 18115:2001
ISO 9334:1995
ISO 9335:1995
ASTM E 1217-00
 

Document History

  1. BS PD ISO/TR 19319:2013


    Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

    • Most Recent
  2. BS PD ISO/TR 19319:2003

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    Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution, analysis area, and sample area viewed by the analyser

    • Historical Version