Language:
    • Available Formats
    •  
    • Availability
    • Priced From ( in USD )
    • Printed Edition
    • Ships in 1-2 business days
    • $18.00
    • Add to Cart

Customers Who Bought This Also Bought

 

About This Item

 

Full Description

This paper describes the integration of an automated, patterned wafer, defect inspection system into the overall defect density engineering strategy for a wafer manufacturing area. These systems are now capable of efficiently collecting statistically representative data directly from product material. The core of this strategy is the routine sampling and in-line defect inspection of production material. This enables rapid, early detection of defects in the manufacturing line and the development of a systematic response to the problems that are observed. In addition, this sampling plan drives continuous improvement of defectivity within the wafer manufacturing area.