927666

SME MS00-236

New Developments In Deep Ultraviolet Laser Metrology For Photolighography

standard by Society of Manufacturing Engineers , 11/01/2000

M.L. Dowell ; C.L. Cromer ; R.D. Jones ; D.A. Keenen ; T.R. Scott

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Full Description

Current and future laser measurement services at 157, 193 and 248 nm will be reviewed. Laser power and energy measurements at 193 nm will be presented; electrical calibration issues will be reviewed. We report an overall calibration uncertainty of laser power and energy meters of less than 2%. Characterization measurements for ultraviolet materials also will be discussed.
 

Product Details

Published:
11/01/2000
Number of Pages:
3
File Size:
1 file , 330 KB