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Laboratories for the 21st Century (Labs 21) has developed energy benchmarking protocols for use in high-tech buildings, with the objective of improving energy efficiency. Prior energy benchmarking in cleanrooms has identified a wide range of operating efficiencies in HVAC systems. This paper updates previous benchmarking efforts and provides ideas for use of benchmark data to improve energy efficiency. The benchmark data highlight the fact that some systems are significantly more energy efficient than others in achieving the same cleanliness. These high-performing systems can help to identify design and operation strategies for new and existing facilities. The metrics developed through Labs 21 and prior work can be used to benchmark widely disparate systems. Cleanroom owners can use energy benchmarks to establish efficiency requirements for new design projects. For example, air change rates, as measured, vary considerably. The benchmark results suggest that lower airflow using significantly less energy can achieve the desired cleanliness levels. The design concepts that produce highly energy efficient systems are examined in this paper. Better integration of observed best practice concepts into cleanroom design should be possible based upon benchmark guidance.

Units: I-P

Citation: Symposium, ASHRAE Transactions, vol. 110, pt. 2