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About This Item

 

Full Description

This standard provides requirements and guidance for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (ISO 14644-8).
 

Document History

  1. ISO 14644-15:2017


    Assessment of suitability for use of equipment and materials by airborn chemical concentration

    • Most Recent
  2. ISO 14644-15:2017


    Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

    • Historical Version
  3. ISO/FDIS 14644-15

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    Assessment of suitability for use of equipment and materials by airborn chemical concentration

    • Historical Version
  4. ISO/DIS 14644-15


    Assessment of suitability for use of equipment and materials by airborn chemical concentration

    • Historical Version