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Full Description

This document establishes typical assessment processes to determine grading levels of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category), and provides a protocol to include test methods, analysis and time-weighted factors for their determination. This document currently considers only concentrations of air chemical contaminants between 100°g/m3 and 10 12°g/m3 under cleanroom operational conditions.

This document is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process.

It is not the intention of this document to describe the nature of air chemical contaminants.

This document does not give a classification of surface chemical contamination.

 

Document History

  1. ISO 14644-8:2022

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    Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC)

    • Most Recent
  2. ISO 14644-8:2013


    Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)

    • Historical Version
  3. ISO 14644-8:2006


    Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination

    • Historical Version