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About This Item

 

Full Description

Please note: This document has not been approved as an American National Standard and does not replace ANSI/IEST/ISO 14644-3:2004 in the United States.

This document provides test methods in support of the operation for cleanrooms and clean zones to meet air cleanliness classification, other cleanliness attributes and related controlled conditions.

Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional airflow and those with non-unidirectional airflow, in three possible occupancy states: as-built, at-rest and operational.

The test methods, recommended test apparatus and test procedures for determining performance parameters are provided. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested.

For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this document can be used by agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements.

This document is not applicable to the measurement of products or of processes in cleanrooms, clean zones or separative devices.

NOTE This document does not purport to address safety considerations.
 

Document History

  1. ISO 14644-3

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    Test Methods (This document has not been approved as an American National Standard and does not replace ANSI/IEST/ISO 14644-3:2004 in the United States.)

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  2. ISO/FDIS 14644-3


    Test Methods

    • Historical Version
  3. ISO/DIS 14644-3


    Test Methods

    • Historical Version