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About This Item

 

Full Description

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

 

Document History

  1. ISO 14644-2:2015

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    Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

    • Most Recent
  2. ISO 14644-2:2015 Plus Redline


    Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration (includes Redline Version)

    • Historical Version
  3. ISO 14644-2:2000


    Cleanrooms and associated controlled environments -- Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1

    • Historical Version
  4. ISO 14644-1 / 14644-2 Set


    Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness and Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 - Save 10%

    • Historical Version
  5. FED FED-STD-209E


    AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (SUPERSEDING FED-STD-209D) (S/S BY ISO14644-1-1999 AND ISO14644-2-2000)

    • Historical Version
  6. FED FED-STD-209D


    CLEAN ROOM AND WORK STATION REQUIREMTENTS, CONTROLLED ENVIRONMENT (S/S BY FED-STD-209E)

    • Historical Version
  7. FED FED-STD-209


    AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (S/S BY FED-STD-209A)

    • Historical Version