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ISO 14644-10:2022

Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

standard by International Organization for Standardization , 05/01/2022

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Full Description

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.

NOTE 1 For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.

NOTE 2 This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

 

Product Details

Published:
05/01/2022
File Size:
1 file , 2.1 MB
Same As:
BS EN ISO 14644-10:2022
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This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 14644-10:2022

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    Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

    • Most Recent

  2. ISO 14644-10:2013


    Classification of surface cleanliness by chemical concentration

    • Historical Version

  3. ISO 14644-10:2013


    Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

    • Historical Version