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ISO 14644-10:2013

Classification of surface cleanliness by chemical concentration

standard by International Organization for Standardization , 03/01/2013

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About This Item

 

Full Description

This standard defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms, and particles). This standard is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment, and devices.
 

Product Details

Edition:
1st
Published:
03/01/2013
Number of Pages:
36
File Size:
1 file , 3.7 MB
Product Code(s):
1, 1, 1
Note:
This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 14644-10:2022


    Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination

    • Most Recent

  2. ISO 14644-10:2013

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    Classification of surface cleanliness by chemical concentration

    • Historical Version

  3. ISO 14644-10:2013


    Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration

    • Historical Version