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Full Description

This part of ISO 14644 covers the classification of air cleanliness in cleanrooms and associated controlled environments exclusively in terms of concentration of airborne particles. Onlyparticlepopulationshavingcumulativedistributionsbased on threshold (lower limit) sizes ranging from 0,1 μm to 5 μm are considered for classification purposes.

This part of ISO 14644 does not provide for classification of particle populations that are outside of the specified particle size range, 0,1 μm to 5 μm. Concentrations of ultrafine particles (particles smaller than 0,1 μm) and macroparticles (particles larger than 5 μm) may be used to quantify these populations in terms of U descriptors and M descriptors, respectively.

This part of ISO 14644 cannot be used to characterize the physical, chemical, radiological, or viable nature of airborne particles.

 

Document History

  1. ISO 14644-1:2015


    Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration

    • Most Recent
  2. ISO 14644-1:2015 Plus Redline


    Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (includes Redline Version)

    • Historical Version
  3. ISO 14644-1 / 14644-2 Set


    Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness and Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1 - Save 10%

    • Historical Version
  4. ISO 14644-1:1999

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    Cleanrooms and associated controlled environments -- Part 1: Classification of air cleanliness

    • Historical Version
  5. FED FED-STD-209E


    AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (SUPERSEDING FED-STD-209D) (S/S BY ISO14644-1-1999 AND ISO14644-2-2000)

    • Historical Version
  6. BS 5295-1:1989


    Environmental cleanliness in enclosed spaces-Specification for clean rooms and clean air devices

    • Historical Version
  7. FED FED-STD-209D


    CLEAN ROOM AND WORK STATION REQUIREMTENTS, CONTROLLED ENVIRONMENT (S/S BY FED-STD-209E)

    • Historical Version
  8. BS 5295-1:1976


    Environmental cleanliness in enclosed spaces-Specification for controlled environment clean rooms, work stations and clean air devices

    • Historical Version
  9. FED FED-STD-209


    AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (S/S BY FED-STD-209A)

    • Historical Version