1718623

Heat Recovery, Energy Savings For Semiconductor Plant

Journal Article by ASHRAE , 2005

Igor Dubov, P.E., Member ASHRAE

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The chilled water system at Tower Semiconductor, a pure-play independent wafer foundry in Israel, is a primary-secondary variable flow system consisting of six centrifugal chillers. One chilleris 1,000 ton (3517 kW) and the other five are 500 ton (1758 kW). The heat recovery system is a variable primary flow.
 

Product Details

Published:
2005
Number of Pages:
4
File Size:
1 file , 1.1 MB
Product Code(s):
D-27191
Note:
This product is unavailable in Russia, Belarus