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Microelectronic mechanical systems (MEMS) have revolutionized the market for sensors by providing small, fast-responding measurement devices at low cost. They have been widely accepted in several common products. As an example, today’s automobile uses between 25 and 70 MEMS sensors to gather information where traditional macroscale sensors would be far too expensive to use.

Citation: ASHRAE Journal, Vol. 46 No. 5, May 2004