BS EN ISO 14644-13:2017 gives guidelines for cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.

The appropriateness of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644-9 and ISO 14644-10.

The following matters of general guidance will be provided:

• expected surface cleanliness levels;
• suitability of cleaning methods;
• compatibility of surfaces with the cleaning technique;
• assessment of cleaning appropriateness.

Cross References:
ISO 14644-8:2013 ED2
ISO 14644-10:2013 ED1
ISO 14644-9:2012
ASTM E2042/E2042M - 09(2016)
ASTM G122 - 96(2015)E1
ISO 14644-1:2015
ASTM D6361/D6361M - 98(2015)
SAE AMS 03-2


All current amendments available at time of purchase are included with the purchase of this document.