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The purpose of this study is to perform energy analysesand simulations of a high-technology, academic researchbuilding on the University of Maryland (UMD) Campus. Thefocus of this paper is on facility benchmarking, energy modelcalibration, and energy efficiency measures (EEMs) proposedand simulated to estimate achievable energy savings for thebuilding's energy-intensive cleanrooms. The high energyintensity of the building, measured as 419 kBtu/ft2 x yr (1322kWh/m2 x yr), is largely due to the building's cleanrooms, whichare responsible for approximately 50% of the total energyconsumption in the building. Three EEMs are identified toreduce cleanroom energy consumption by an estimated 21.6%(10.6% of total building energy use). The proposed workcontributes significantly to the limited number of cleanroomenergy studies published in the academic research community,especially for those cleanrooms embedded in larger buildings.