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Full Description

1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.

Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.

 

Document History

  1. ASTM F24-20


    Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces

    • Most Recent
  2. ASTM F24-09(2015)


    Standard Test Method for Measuring and Counting Particulate Contamination on Surfaces

    • Historical Version
  3. ASTM F24-09


    Standard Method for Measuring and Counting Particulate Contamination on Surfaces

    • Historical Version
  4. ASTM F24-04

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    Standard Method for Measuring and Counting Particulate Contamination on Surfaces

    • Historical Version
  5. ASTM F24-00


    Standard Method for Measuring and Counting Particulate Contamination on Surfaces

    • Historical Version