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Full Description

1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).

 

Document History

  1. ASTM E673-03


    Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

    • Most Recent
  2. ASTM E673-02b


    Standard Terminology Relating to Surface Analysis

    • Historical Version
  3. ASTM E673-02a


    Standard Terminology Relating to Surface Analysis

    • Historical Version
  4. ASTM E673-02


    Standard Terminology Relating to Surface Analysis

    • Historical Version
  5. ASTM E673-01


    Standard Terminology Relating to Surface Analysis

    • Historical Version
  6. ASTM E673-98E1

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    Standard Terminology Relating to Surface Analysis

    • Historical Version