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About This Item

 

Full Description

This National Standard establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. This part of ISO 14644 applies to all solid surfaces, such as walls, ceilings, floors, working environments, tools, equipment and products. The classification of surface cleanliness by particle concentration (SCP) is limited to particles between 0.05 µm and 500 µm. Recommendations on testing and measuring methods, as well as information about surface characteristics, are provided in the annexes.
 

Document History

  1. ANSI/IEST/ISO 14644-9-2022


    Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration

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  2. ANSI/IEST/ISO 14644-9

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    Classification of surface cleanliness by particle concentration

    • Historical Version