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Full Description

This national Standard establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.

ISO 14644-8:2013 currently considers only concentrations of air chemical contaminants between 100 and 10?12 g/m3 under cleanroom operational conditions. This Standard is not relevant for application in those industries, processes or productions where the presence of airborne chemical substances is not considered a risk to the product or process. It is not the intention of ISO 14644-8:2013 to describe the nature of air chemical contaminants. ISO 14644-8:2013 does not give a classification of surface chemical contamination.
 

Document History

  1. ANSI/IEST/ISO 14644-8:2022


    Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC)

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  2. ANSI/IEST/ISO 14644-8

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    Classification of air cleanliness by chemical concentration (ACC)

    • Historical Version