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Codes and standards published by NFPA are displayed as read-only under license from NFPA solely for use within this system. NFPA material may not be downloaded, printed, reproduced, or transferred.

Chemical safety and emergency response demand the 2015 NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities.

The semiconductor industry is continually growing, requiring new safeguards to address evolving hazards. Completely reorganized and up-to-date with the latest coverage of technologies such as photovoltaics, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled -- containing a cleanroom or clean zone or both.

Chapters address every aspect of safety, from general safety precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control station, and means of egress. This edition adds display panel and photovoltaic production to its scope, along with other major changes.

The 2015 NFPA 318 assists all stakeholders involved in fire protection: engineers, AHJs, facility personnel, and contractors.

This rewritten, clarified edition provides new definitions, identification of hazardous materials categories, and an introduction to Hazard Production Material (HPM) risk assessment. It also adds numerous new requirements addressing:
  • Hazardous materials
  • Liquid chemical storage and handling
  • Gas storage and handling
  • Production and support equipment
  • Waste treatment
  • Fire protection
 

Document History

  1. NFPA (Fire) 318


    Standard for the Protection of Semiconductor Fabrication Facilities, 2022 Edition

    • Most Recent
  2. NFPA (Fire) 318


    Standard for the Protection of Semiconductor Fabrication Facilities, 2018 Edition

    • Historical Version
  3. NFPA (Fire) 318

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    Standard for the Protection of Semiconductor Fabrication Facilities, 2015 Edition

    • Historical Version
  4. NFPA (Fire) 318


    Standard for the Protection of Semiconductor Fabrication Facilities, 2012 Edition

    • Historical Version
  5. NFPA (Fire) 318


    Standard for the Protection of Semiconductor Fabrication Facilities, 2009 Edition

    • Historical Version
  6. NFPA (Fire) 318


    Standard for the Protection of Semiconductor Fabrication Facilities, 2006 edition

    • Historical Version
  7. NFPA (Fire) 318


    Protection of Cleanrooms, 2000 Edition

    • Historical Version