1311086

ISO 18516:2006

Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution

standard by International Organization for Standardization , 11/01/2006

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ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.

Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.

 

Product Details

Published:
11/01/2006
File Size:
1 file , 590 KB
Same As:
BS ISO 18516:2006, BS ISO 18516:2006
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This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 18516:2019


    Surface chemical analysis - Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

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  2. ISO 18516:2006

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    Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution

    • Historical Version