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ISO 18114:2021

Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials

standard by International Organization for Standardization , 05/01/2021

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This document specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.

The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

 

Product Details

Published:
05/01/2021
File Size:
1 file , 1000 KB
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This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 18114:2021

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    Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials

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  2. ISO 18114:2003


    Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials

    • Historical Version