1853046

ISO 16413:2013

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

standard by International Organization for Standardization , 02/15/2013

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Published:
02/15/2013
File Size:
1 file , 2.2 MB
Same As:
BS ISO 16413:2013
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This product is unavailable in Ukraine, Russia, Belarus
 

Document History

  1. ISO 16413:2020


    Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

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  2. ISO 16413:2013

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    Evaluation of thickness, density and interface width of thin films by X-ray reflectometry - Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

    • Historical Version