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Document History

  1. DIN 32567-1

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    Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences

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  2. DIN 32567-1 - DRAFT


    Draft Document - Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 1: Qualitative estimation of the material and procedure specific influences

    • Historical Version