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BS ISO 16413:2020

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

standard by British Standard / International Organization for Standardization , 08/18/2020

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About This Item

 

Full Description

This document specifies a method for the evaluation of thickness, density and interface width of single layer and multi-layered thin films which have thicknesses between approximately 1 nm and 1 µm, on flat substrates, by means of X-Ray Reflectometry (XRR).

All current amendments available at time of purchase are included with the purchase of this document.
 

Product Details

Published:
08/18/2020
ISBN(s):
9780539016529
Number of Pages:
42
File Size:
1 file , 3.7 MB
Product Code(s):
30380296, 30380296, 30380296
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This product is unavailable in Russia, Ukraine, Belarus
 

Document History

  1. BS ISO 16413:2020

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    Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

    • Most Recent

  2. BS ISO 16413:2013


    Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

    • Historical Version

  3. BS 12/30235353 DC


    BS ISO 16413. Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

    • Historical Version